Carbonized silicon ceramics (TPSS) "high purity, high strength, high corrosion resistance"
Semiconductor-related materials essential for semiconductor manufacturing processes that combine high purity, high strength, and high corrosion resistance!
TPSS, primarily composed of high-purity silicon carbide, is a semiconductor-related material developed using proprietary technology from Quartz Tech. It is applied in various products, including furnace core tubes for semiconductor thermal processing, as well as heating tubes, boats, and forks. 【Material】 High-purity reaction-sintered silicon carbide TPSS 【Features】 - Addresses a wide range of user needs from high-temperature to low-temperature processes - High purity, high strength, high corrosion resistance - Usable at high temperatures (up to 1350°C) - Suppresses particle generation We also offer grades coated with ultra-high-purity and dense silicon carbide films using the CVD method on the product surface. In particular, our wafer boats, which incorporate precision machining technology, are well-regarded and contribute to the quality and yield improvement of 300mm wafer processes. *For more details, please contact us.
- 企業：M.WATANABE & CO.,LTD.
- 価格：Other
